The James Watt Nanofabrication Centre (www.jwnc.gla.ac.uk) at the University of Glasgow is one of the most extensive nanofabrication centres in Europe and provides cutting edge access to the many fundamental processing and characterisation facilities utilised in our research. These include:
- Electron-beam and photo-lithography
- Electron beam and thermal evaporation, sputtering and pulsed laser deposition of a range of materials.
- Rapid thermal annealing
- Various dry etch, plasma treatment and dielectric deposition
- Scanning electron beam microscopy
- Surface profiling using Atomic Force Microscopy
Our work also relies on the wide-range of characterisation capability available at the University of Glasgow, including:
- Varied temperature Hall/Van der Pauw
- I-V and multi-frequency C-V measurement
- On wafer small-signal extraction and RF characterisation up to 320 GHz